Canon is moving ahead with a plan to build a new factory in Japan to double the production of its semiconductor lithography equipment.
The planned facility will produce both the standard KrF and i-line machines that constitute the bulk of the division’s sales and the nanoimprint tools that Canon hopes will open a new era in semiconductor manufacturing.
Addressing investors after the announcement of third-quarter results in late October, Canon’s management referred to “our leading-edge nanoimprint lithography equipment.”
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